MICRO/NANO FABRICATION
 
 
 
         
 
 
4-Point Probe
 
4-Point Probe
Metal µÎ²² ÃøÁ¤
       
 
Nanospec
 
Nanospec
¹Ú¸· (SiO2, SiN, PR,,,,,,,,,)µÎ²² ÃøÁ¤
       
 
ALPHA STEP
 
alpha step
Á¦Á¶»ç : KLA-TENCOR
¸ðµ¨ : ASIQ
¼³Ä¡ÀÏ : 2008³â 6¿ù 16ÀÏ
´ÜÂ÷ ¹× Thin FilmÀÇ µÎ²²¸¦ ÃøÁ¤ÇÏ´Â Àåºñ
       
 
E-SEM
 
E-SEM
Á¦Á¶»ç:TESCAN
¸ðµ¨¸í:VEGA MIRA-LMU SEM
Resolution: In high vacuum mode (SE): < 2.0 nm at 30 kV
Resolution: In low vacuum mode : < 2.5 nm at 30 kV