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4-Point Probe |
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4-Point Probe |
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Metal µÎ²² ÃøÁ¤
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Nanospec |
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Nanospec |
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¹Ú¸· (SiO2, SiN, PR,,,,,,,,,)µÎ²² ÃøÁ¤
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ALPHA STEP |
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alpha step |
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Á¦Á¶»ç : KLA-TENCOR
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¸ðµ¨ : ASIQ
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¼³Ä¡ÀÏ : 2008³â 6¿ù 16ÀÏ
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´ÜÂ÷ ¹× Thin FilmÀÇ µÎ²²¸¦ ÃøÁ¤ÇÏ´Â Àåºñ |
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E-SEM |
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E-SEM |
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Á¦Á¶»ç:TESCAN
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¸ðµ¨¸í:VEGA MIRA-LMU SEM
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Resolution: In high vacuum mode (SE): < 2.0 nm at 30 kV
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Resolution: In low vacuum mode : < 2.5 nm at 30 kV |
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