MICRO/NANO FABRICATION
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4-Point Probe
ALPHA STEP
AOE Etcher (Pt,PZT)
DEEP TRENCH RIE
DEEP TRENCH RIE II
E-Beam Evaporator
E-Beam Evaporator II
E-beam Lithography
[1]
[2]
[3]
[4]
[5]
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