|
¹øÈ£ |
»çÁø |
Àåºñ¸í |
ºÐ·ù |
Àåºñº¸±â |
¿¹¾à½Åû |
51 |
|
RIE I |
ETCHING |
|
|
50 |
|
DEEP TRENCH RIE |
ETCHING |
|
|
49 |
|
PECVD I |
DEPOSITION |
|
|
48 |
|
(MA6)¥°Á¶°¢½ÃÆí |
PHOTO_LITHOGRAPHY |
|
|
47 |
|
(MA6)¥±4ÀÎÄ¡Àü¿ë |
PHOTO_LITHOGRAPHY |
|
|
46 |
|
SPIN COATER |
PHOTO_LITHOGRAPHY |
|
|
45 |
|
WET-STATION(ACID) |
WET-STATION |
|
|
44 |
|
WET-STATION(ORGANIC) |
WET-STATION |
|
|
43 |
|
M2000 Laser °¡°ø±â |
ETCHING |
|
|
42 |
|
E-Beam Evaporator |
DEPOSITION |
|
|
41 |
|
AOE Etcher (Pt,PZT) |
ETCHING |
|
|
40 |
|
Wafer Bonder/Aligner |
ASSEMBLY |
|
|
39 |
|
OxfordEtcher(ÈÇÕ¹°) |
ETCHING |
|
|
38 |
|
Microwave Plasma Asher |
ETCHING |
|
|
37 |
|
Parylene coater |
DEPOSITION |
|
|
36 |
|
4-Point Probe |
INSPECTION |
|
|
35 |
|
SPIN RINSE DRYER |
WET-STATION |
|
|
34 |
|
Nanospec |
INSPECTION |
|
|
33 |
|
Wet-station(KOH) |
WET-STATION |
|
|
32 |
|
ALPHA STEP |
INSPECTION |
|
|
|