MICRO/NANO FABRICATION
 
 
 
         
 
 
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52 RIE I ETCHING
51 DEEP TRENCH RIE ETCHING
50 PECVD I DEPOSITION
49 (MA6)¥°Á¶°¢½ÃÆí PHOTO_LITHOGRAPHY
48 (MA6)¥±4ÀÎÄ¡Àü¿ë PHOTO_LITHOGRAPHY
47 SPIN COATER PHOTO_LITHOGRAPHY
46 WET-STATION(ACID) WET-STATION
45 WET-STATION(ORGANIC) WET-STATION
44 M2000 Laser °¡°ø±â ETCHING
43 E-Beam Evaporator DEPOSITION
42 AOE Etcher (Pt,PZT) ETCHING
41 Wafer Bonder/Aligner ASSEMBLY
40 OxfordEtcher(È­ÇÕ¹°) ETCHING
39 Microwave Plasma Asher ETCHING
38 Parylene coater DEPOSITION
37 4-Point Probe INSPECTION
36 SPIN RINSE DRYER WET-STATION
35 Nanospec INSPECTION
34 Wet-station(KOH) WET-STATION
33 ALPHA STEP INSPECTION
   
 
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