MICRO/NANO FABRICATION
 
 
 
         
 
 
번호 사진 장비명 분류 장비보기 예약신청
48 RIE I ETCHING
47 DEEP TRENCH RIE ETCHING
46 PECVD I DEPOSITION
45 (MA6)Ⅰ조각시편 PHOTO_LITHOGRAPHY
44 (MA6)Ⅱ4인치전용 PHOTO_LITHOGRAPHY
43 SPIN COATER PHOTO_LITHOGRAPHY
42 WET-STATION(ACID) WET-STATION
41 WET-STATION(ORGANIC) WET-STATION
40 M2000 Laser 가공기 ETCHING
39 E-Beam Evaporator DEPOSITION
38 AOE Etcher (Pt,PZT) ETCHING
37 Wafer Bonder/Aligner ASSEMBLY
36 OxfordEtcher(화합물) ETCHING
35 Microwave Plasma Asher ETCHING
34 Parylene coater DEPOSITION
33 4-Point Probe INSPECTION
32 SPIN RINSE DRYER WET-STATION
31 Nanospec INSPECTION
30 Wet-station(KOH) WET-STATION
29 ALPHA STEP INSPECTION
   
 
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