|
¹øÈ£ |
»çÁø |
Àåºñ¸í |
ºÐ·ù |
Àåºñº¸±â |
¿¹¾à½Åû |
52 |
 |
RIE I |
ETCHING |
 |
 |
51 |
 |
DEEP TRENCH RIE |
ETCHING |
 |
 |
50 |
 |
PECVD I |
DEPOSITION |
 |
 |
49 |
 |
(MA6)¥°Á¶°¢½ÃÆí |
PHOTO_LITHOGRAPHY |
 |
 |
48 |
 |
(MA6)¥±4ÀÎÄ¡Àü¿ë |
PHOTO_LITHOGRAPHY |
 |
 |
47 |
 |
SPIN COATER |
PHOTO_LITHOGRAPHY |
 |
 |
46 |
 |
WET-STATION(ACID) |
WET-STATION |
 |
 |
45 |
 |
WET-STATION(ORGANIC) |
WET-STATION |
 |
 |
44 |
 |
M2000 Laser °¡°ø±â |
ETCHING |
 |
 |
43 |
 |
E-Beam Evaporator |
DEPOSITION |
 |
 |
42 |
 |
AOE Etcher (Pt,PZT) |
ETCHING |
 |
 |
41 |
 |
Wafer Bonder/Aligner |
ASSEMBLY |
 |
 |
40 |
 |
OxfordEtcher(ÈÇÕ¹°) |
ETCHING |
 |
 |
39 |
 |
Microwave Plasma Asher |
ETCHING |
 |
 |
38 |
 |
Parylene coater |
DEPOSITION |
 |
 |
37 |
 |
4-Point Probe |
INSPECTION |
 |
 |
36 |
 |
SPIN RINSE DRYER |
WET-STATION |
 |
 |
35 |
 |
Nanospec |
INSPECTION |
 |
 |
34 |
 |
Wet-station(KOH) |
WET-STATION |
 |
 |
33 |
 |
ALPHA STEP |
INSPECTION |
 |
 |
|