MICRO/NANO FABRICATION
 
 
 
         
 
 
번호 사진 장비명 분류 장비보기 예약신청
49 RIE I ETCHING
48 DEEP TRENCH RIE ETCHING
47 PECVD I DEPOSITION
46 (MA6)Ⅰ조각시편 PHOTO_LITHOGRAPHY
45 (MA6)Ⅱ4인치전용 PHOTO_LITHOGRAPHY
44 SPIN COATER PHOTO_LITHOGRAPHY
43 WET-STATION(ACID) WET-STATION
42 WET-STATION(ORGANIC) WET-STATION
41 M2000 Laser 가공기 ETCHING
40 E-Beam Evaporator DEPOSITION
39 AOE Etcher (Pt,PZT) ETCHING
38 Wafer Bonder/Aligner ASSEMBLY
37 OxfordEtcher(화합물) ETCHING
36 Microwave Plasma Asher ETCHING
35 Parylene coater DEPOSITION
34 4-Point Probe INSPECTION
33 SPIN RINSE DRYER WET-STATION
32 Nanospec INSPECTION
31 Wet-station(KOH) WET-STATION
30 ALPHA STEP INSPECTION
   
 
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