| |
| 번호 |
사진 |
장비명 |
분류 |
장비보기 |
예약신청 |
| 52 |
 |
RIE I |
ETCHING |
 |
 |
| 51 |
 |
DEEP TRENCH RIE |
ETCHING |
|
|
| 50 |
|
PECVD I |
DEPOSITION |
|
|
| 49 |
 |
(MA6)Ⅰ조각시편 |
PHOTO_LITHOGRAPHY |
|
|
| 48 |
|
(MA6)Ⅱ4인치전용 |
PHOTO_LITHOGRAPHY |
|
|
| 47 |
 |
SPIN COATER |
PHOTO_LITHOGRAPHY |
|
|
| 46 |
 |
WET-STATION(ACID) |
WET-STATION |
|
|
| 45 |
 |
WET-STATION(ORGANIC) |
WET-STATION |
|
|
| 44 |
 |
M2000 Laser 가공기 |
ETCHING |
|
|
| 43 |
 |
E-Beam Evaporator |
DEPOSITION |
|
|
| 42 |
 |
AOE Etcher (Pt,PZT) |
ETCHING |
|
|
| 41 |
 |
Wafer Bonder/Aligner |
ASSEMBLY |
|
|
| 40 |
 |
OxfordEtcher(화합물) |
ETCHING |
|
|
| 39 |
 |
Microwave Plasma Asher |
ETCHING |
|
|
| 38 |
 |
Parylene coater |
DEPOSITION |
|
|
| 37 |
 |
4-Point Probe |
INSPECTION |
|
|
| 36 |
 |
SPIN RINSE DRYER |
WET-STATION |
|
|
| 35 |
 |
Nanospec |
INSPECTION |
|
|
| 34 |
 |
Wet-station(KOH) |
WET-STATION |
|
|
| 33 |
 |
ALPHA STEP |
INSPECTION |
|
|
|
