| |
| 번호 |
사진 |
장비명 |
분류 |
장비보기 |
예약신청 |
| 32 |
 |
E-SEM |
INSPECTION |
 |
 |
| 31 |
 |
Electroforming Machine |
DEPOSITION |
|
|
| 30 |
 |
PECVD II |
DEPOSITION |
|
|
| 29 |
 |
LPCVD3 (LTO) |
DEPOSITION |
|
|
| 28 |
|
LPCVD4 (Low Stress Nitride) |
DEPOSITION |
|
|
| 27 |
 |
RIE II |
ETCHING |
|
|
| 26 |
 |
기본Charge |
OTHERS |
|
|
| 25 |
 |
FURNACE 2 |
DEPOSITION |
|
|
| 24 |
.JPG) |
LPCVD5(Poly) |
DEPOSITION |
|
|
| 23 |
 |
Multi Sputter |
DEPOSITION |
|
|
| 22 |
|
공간사용료 |
OTHERS |
|
|
| 21 |
 |
E-beam Lithography |
PHOTO_LITHOGRAPHY |
|
|
| 20 |
 |
wafer 제공 |
OTHERS |
|
|
| 19 |
 |
Ion Milling |
ETCHING |
|
|
| 18 |
|
사물함 |
OTHERS |
|
|
| 17 |
 |
E-Beam Evaporator II |
DEPOSITION |
|
|
| 16 |
 |
RIEⅢ |
ETCHING |
|
|
| 15 |
 |
Spin Coater3 |
PHOTO_LITHOGRAPHY |
|
|
| 14 |
|
시약안전보관함 |
OTHERS |
|
|
| 13 |
|
유기시약보관함 |
OTHERS |
|
|
|
