MICRO/NANO FABRICATION
 
 
 
         
 
ÆÕ¼¾ÅÍ Shutdown ¾È³» (°øÁ¶±â ±³Ã¼ ÀÛ¾÷) fab 25-11-26 342
ºÎ°¡¼¼ Ãß°¡ ¾È³» fab 25-10-30 552
[°øÁ¤ »ó´ã ¹× À̿뿡 ´ëÇÑ ¾È³»] fab 17-09-27 16545
102 AOE Etcher ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 10-01-05 6096
101 (Çʵ¶) ½ÅÁ¤¿¬ÈÞ ±â°£ ÈÞ¹«°ü·Ã °øÁö»çÇ×ÀÔ´Ï´Ù¡¦ fab 09-12-29 6005
100 AOE Etcher ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-12-23 5853
99 Oxford ICP ¼ö¸® ¿Ï·á fab 09-12-16 5843
98 Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù. fab 09-12-02 6411
97 RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-10-09 5817
96 E-Beam lithography °øÁ¤¼­ºñ½º ½ÃÀÛ fab 09-08-25 7200
95 Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 09-08-11 5736
94 Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù. fab 09-07-31 5929
93 E-Beam Evaporator ¼ö¸® ¿Ï·á fab 09-06-25 6074
92 E-Beam Evaporator Á¡°ËÁß fab 09-06-25 5602
91 °øÁ¶±â Á¡°Ë¿Ï·á fab 09-06-09 5971
90 °øÁ¶±â Á¡°Ë fab 09-06-08 6219
89 4¿ù 11ÀÏ(Åä) Fab ÃâÀÔ±ÝÁö fab 09-04-07 5749
88 °íÁø°ø Multi Sputter ¼³Ä¡ ¿Ï·á fab 09-03-13 6658
 
 
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