MICRO/NANO FABRICATION
 
 
 
         
 
KIST Ãß°èüÀ°´ëȸ Çà»ç ¾È³» 2025.10.17 (±Ý¿ä¡¦ fab 25-10-13 305
ÃÖ÷´Ü Maskless Aligner ½Å±Ô Àåºñ µµÀÔ ¹× °ø¡¦ fab 24-11-06 2472
¿¹¾à ½ºÄÉÁì ¾È³» fab 24-09-19 2245
[°øÁ¤ »ó´ã ¹× À̿뿡 ´ëÇÑ ¾È³»] fab 17-09-27 15988
99 Oxford ICP ¼ö¸® ¿Ï·á fab 09-12-16 5684
98 Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù. fab 09-12-02 6298
97 RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-10-09 5708
96 E-Beam lithography °øÁ¤¼­ºñ½º ½ÃÀÛ fab 09-08-25 7085
95 Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 09-08-11 5626
94 Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù. fab 09-07-31 5827
93 E-Beam Evaporator ¼ö¸® ¿Ï·á fab 09-06-25 5970
92 E-Beam Evaporator Á¡°ËÁß fab 09-06-25 5462
91 °øÁ¶±â Á¡°Ë¿Ï·á fab 09-06-09 5873
90 °øÁ¶±â Á¡°Ë fab 09-06-08 6131
89 4¿ù 11ÀÏ(Åä) Fab ÃâÀÔ±ÝÁö fab 09-04-07 5667
88 °íÁø°ø Multi Sputter ¼³Ä¡ ¿Ï·á fab 09-03-13 6463
87 (Çʵ¶) Àý¿¬ÃøÁ¤À¸·Î Fab »ç¿ë ÀϽà Áß´Ü fab 09-03-13 5418
86 2¿ù 13ÀÏ(±Ý) ÈÞ¹«¾È³» fab 09-02-11 5392
85 (Çʵ¶: ±ä±Þ) M-2000 Laser Àåºñ »ç¿ë °¡´ÉÇÕ´Ï¡¦ fab 09-01-23 5438
 
 
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