MICRO/NANO FABRICATION
 
 
 
         
 
ÆÕ¼¾ÅÍ Shutdown ¾È³» (°øÁ¶±â ±³Ã¼ ÀÛ¾÷) fab 25-11-26 389
ºÎ°¡¼¼ Ãß°¡ ¾È³» fab 25-10-30 591
[°øÁ¤ »ó´ã ¹× À̿뿡 ´ëÇÑ ¾È³»] fab 17-09-27 16596
102 AOE Etcher ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 10-01-05 6099
101 (Çʵ¶) ½ÅÁ¤¿¬ÈÞ ±â°£ ÈÞ¹«°ü·Ã °øÁö»çÇ×ÀÔ´Ï´Ù¡¦ fab 09-12-29 6008
100 AOE Etcher ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-12-23 5860
99 Oxford ICP ¼ö¸® ¿Ï·á fab 09-12-16 5848
98 Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù. fab 09-12-02 6416
97 RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-10-09 5820
96 E-Beam lithography °øÁ¤¼­ºñ½º ½ÃÀÛ fab 09-08-25 7204
95 Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 09-08-11 5741
94 Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù. fab 09-07-31 5933
93 E-Beam Evaporator ¼ö¸® ¿Ï·á fab 09-06-25 6079
92 E-Beam Evaporator Á¡°ËÁß fab 09-06-25 5605
91 °øÁ¶±â Á¡°Ë¿Ï·á fab 09-06-09 5973
90 °øÁ¶±â Á¡°Ë fab 09-06-08 6222
89 4¿ù 11ÀÏ(Åä) Fab ÃâÀÔ±ÝÁö fab 09-04-07 5752
88 °íÁø°ø Multi Sputter ¼³Ä¡ ¿Ï·á fab 09-03-13 6664
 
 
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