MICRO/NANO FABRICATION
LPCVD (Low Stress Nitride) ¼ö¸® ¿Ï·á
2006-03-09
4,817
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1) KOH E/R=30A/hr, Uniformity 3% ¹Ì¸¸.<br />
2) Membrane (Low Stress Nitride), 100MPaÀÌÇÏ<br />
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