MICRO/NANO FABRICATION
 
 
 
         
 
[°øÁ¤ »ó´ã ¹× ÀÌ¿ë¿¡ ´ëÇÑ ¾È³»] fab 17-09-27 12235
106 (Çʵ¶) 5¿ù28ÀÏ Ã¼À°Çà»ç(KIST)·Î Fab¼¾ÅÍ ¾÷¹«¡¦ fab 10-05-24 5407
105 4¿ù 10ÀÏ Fab ÃâÀÔ±ÝÁö ¾È³» fab 10-04-06 5292
104 Fab ´©ÀüÃøÁ¤ ¾È³» fab 10-03-16 5330
103 ÈÞ¹«¾È³» fab 10-02-01 6500
102 AOE Etcher ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 10-01-05 5407
101 (Çʵ¶) ½ÅÁ¤¿¬ÈÞ ±â°£ ÈÞ¹«°ü·Ã °øÁö»çÇ×ÀÔ´Ï´Ù¡¦ fab 09-12-29 5294
100 AOE Etcher ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-12-23 5107
99 Oxford ICP ¼ö¸® ¿Ï·á fab 09-12-16 5076
98 Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù. fab 09-12-02 5658
97 RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù. fab 09-10-09 5065
96 E-Beam lithography °øÁ¤¼­ºñ½º ½ÃÀÛ fab 09-08-25 6419
95 Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù. fab 09-08-11 4984
94 Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù. fab 09-07-31 5167
93 E-Beam Evaporator ¼ö¸® ¿Ï·á fab 09-06-25 5346
92 E-Beam Evaporator Á¡°ËÁß fab 09-06-25 4850
 
 
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