MICRO/NANO FABRICATION
[°øÁ¤ »ó´ã ¹× ÀÌ¿ë¿¡ ´ëÇÑ ¾È³»]
fab
17-09-27
12235
106
(Çʵ¶) 5¿ù28ÀÏ Ã¼À°Çà»ç(KIST)·Î Fab¼¾ÅÍ ¾÷¹«¡¦
fab
10-05-24
5408
105
4¿ù 10ÀÏ Fab ÃâÀÔ±ÝÁö ¾È³»
fab
10-04-06
5292
104
Fab ´©ÀüÃøÁ¤ ¾È³»
fab
10-03-16
5330
103
ÈÞ¹«¾È³»
fab
10-02-01
6500
102
AOE Etcher ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù.
fab
10-01-05
5407
101
(Çʵ¶) ½ÅÁ¤¿¬ÈÞ ±â°£ ÈÞ¹«°ü·Ã °øÁö»çÇ×ÀÔ´Ï´Ù¡¦
fab
09-12-29
5294
100
AOE Etcher ¼ö¸® ÁßÀÔ´Ï´Ù.
fab
09-12-23
5107
99
Oxford ICP ¼ö¸® ¿Ï·á
fab
09-12-16
5076
98
Oxford ICP Àåºñ Á¡°Ë ÁßÀÔ´Ï´Ù.
fab
09-12-02
5658
97
RIE¥± Àåºñ Gate Valve ¼ö¸® ÁßÀÔ´Ï´Ù.
fab
09-10-09
5065
96
E-Beam lithography °øÁ¤¼ºñ½º ½ÃÀÛ
fab
09-08-25
6419
95
Oxford ICP ¼ö¸® ¿Ï·áµÇ¾ú½À´Ï´Ù.
fab
09-08-11
4985
94
Oxford ICP Àåºñ ¼ö¸®ÁßÀÔ´Ï´Ù.
fab
09-07-31
5167
93
E-Beam Evaporator ¼ö¸® ¿Ï·á
fab
09-06-25
5346
92
E-Beam Evaporator Á¡°ËÁß
fab
09-06-25
4850
1
2
3
4
5
6
7
8
9
10
Á¦¸ñ
³»¿ë
Á¦¸ñ+³»¿ë
and
or